close

Mar. 14, 2022
【Updated for March】Analytical Technology Information Site for the Semiconductor Field
Toray Research Center, Inc. (TRC) is pleased to offer a website that collects technical documents and presentation movie that introduce the latest analysis technologies and case studies, as well as academic papers that have been presented at various conferences, in the semiconductor field.

Information is updated every month and this month's topic is as follows.

*Topic in March*

Movie:
・Advanced techniques based on TEM for the characterization of SiC and GaN power semiconductor devices.
- carrier distribution, interface structure, crystal defect -
(19 minutes / Analytical technologies: SEM, TEM, SCM, DPC-STEM, EDX, STEM-EELS,)
 
・Evaluation techniques for thin films by non-destructive analysis methods.
(6 minutes / Analytical technologies: XRR, FT-IR, XPS)

・Crystal phase analysis of Hf1-xZrxO2 thin film.
-for the improve of dielectric properties-
(6 minutes / Analytical technologies: ACOM-TEM(ASTAR))

You can see the contents including the past publications for free.
Please visit the following URL!

URL:
https://www3.toray-research.co.jp/special_contents/semiconductor/semiconductor_index.html