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Apr. 5, 2018
Toray Research Center, Inc.
European Conference on Silicon Carbide and Related Materials
(ECSCRM 2018) 
3 Poster Presentations and Exhibition: Sep. 2 – Sep. 6, 2018
International Convention Centre, Birmingham, UK
Booth: A8

Poster Presentation :
  1. Stress characterization of 4H-SiC epitaxial substrates by scanning near-field optical Raman microscope, with 250-nm spatial resolution
  2. Atomic coordination analysis of nitrogen introduced in SiO2/SiC interface and SiO2 layer by XAFS measurement
  3. Optimization of depth resolution on profiling of SiO2/SiC interface by dual-beam TOF-SIMS combined with etching


https://warwick.ac.uk/fac/sci/eng/ecscrm2018/